Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N

摘要

X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO2 and the layers on the basis of Si-Al-N contain Si3N4 amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.